Laser Microfabrication: Thin Film Processes and Lithography

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This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

Format:Hardcover

Language:English

ISBN:0122334302

ISBN13:9780122334306

Release Date:June 1989

Publisher:Academic Press

Length:587 Pages

Weight:2.45 lbs.

Dimensions:1.7" x 6.3" x 9.3"

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Laser Microfabrication: Thin Film Processes and Lithography

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